Chapter 6. Electrochemical Pore Formation

  1. Dr. Volker Lehmann

Published Online: 6 MAR 2002

DOI: 10.1002/3527600272.ch6

Electrochemistry of Silicon: Instrumentation, Science, Materials and Applications

Electrochemistry of Silicon: Instrumentation, Science, Materials and Applications

How to Cite

Lehmann, V. (2002) Electrochemical Pore Formation, in Electrochemistry of Silicon: Instrumentation, Science, Materials and Applications, Wiley-VCH Verlag GmbH, Weinheim, FRG. doi: 10.1002/3527600272.ch6

Author Information

  1. Infineon Technologies AG, Corporate Research, Otto-Hahn-Ring 6, 81739 München, Germany

Publication History

  1. Published Online: 6 MAR 2002
  2. Published Print: 22 FEB 2002

ISBN Information

Print ISBN: 9783527293216

Online ISBN: 9783527600274

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Keywords:

  • pore formation;
  • porous silicon;
  • formation models;
  • pore size regimes;
  • pore growth rates;
  • porosity;
  • pore density;
  • specific surface area;
  • drying methods;
  • ageing effects;
  • electrical properties

Summary

  • Basics of Pore Formation

    • Initial State of the Electrode

    • Pore Geometry

    • Pore Position

  • Porous Silicon Formation Models

    • Linear Stability Analyses

    • Probability Analyses

    • Passivity and Passivity Breakdown

  • Pore Size Regimes and Pore Growth Rates

  • Porosity, Pore Density and Specific Surface Area

  • Mechanical Properties and Drying Methods

  • Chemical Composition and Ageing Effects

  • Electrical Properties of Porous Silicon

    • Contacts to Porous Films

    • Definition of Conductivity and the Macroporous Case

    • Conductivity of Mesoporous Silicon

    • Conductivity of Microporous Silicon

    • Photoconductivity of Porous Silicon

    • Carrier Mobility in Porous Silicon

    • Dielectric Constant of Porous Silicon