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CVD (Chemical Vapor Deposition)

  1. Bernard S. Meyerson

Published Online: 15 APR 2003

DOI: 10.1002/3527600434.eap089

Encyclopedia of Applied Physics

Encyclopedia of Applied Physics

How to Cite

Meyerson, B. S. 2003. CVD (Chemical Vapor Deposition). Encyclopedia of Applied Physics. .

Author Information

  1. IBM T. J. Watson Research Center, IBM Research Division, Yorktown Heights, New York, U.S.A.

Publication History

  1. Published Online: 15 APR 2003