Standard Article

Plasma Etching

  1. Eray S. Aydil

Published Online: 15 APR 2003

DOI: 10.1002/3527600434.eap339

Encyclopedia of Applied Physics

Encyclopedia of Applied Physics

How to Cite

Aydil, E. S. 2003. Plasma Etching. Encyclopedia of Applied Physics. .

Author Information

  1. University of California, Department of Chemical Engineering, Santa Barbara, California, U.S.A.

Publication History

  1. Published Online: 15 APR 2003