Standard Article

Semiconductor-Device Integration

  1. Hideo Sunami

Published Online: 15 APR 2003

DOI: 10.1002/3527600434.eap413

Encyclopedia of Applied Physics

Encyclopedia of Applied Physics

How to Cite

Sunami, H. 2003. Semiconductor-Device Integration. Encyclopedia of Applied Physics. .

Author Information

  1. Hitachi, Ltd., Memory Business Operation, Semiconductor & Integrated Circuits Division, Kodaira, Tokyo, Japan

Publication History

  1. Published Online: 15 APR 2003