Standard Article

Sputtering

  1. Akira Kinbara

Published Online: 15 APR 2003

DOI: 10.1002/3527600434.eap467

Encyclopedia of Applied Physics

Encyclopedia of Applied Physics

How to Cite

Kinbara, A. 2003. Sputtering. Encyclopedia of Applied Physics. .

Author Information

  1. Kanazawa Institute of Technology, Ishikawa, Japan

Publication History

  1. Published Online: 15 APR 2003