Standard Article

Thin-film Deposition

  1. John R. Arthur

Published Online: 15 APR 2003

DOI: 10.1002/3527600434.eap518

Encyclopedia of Applied Physics

Encyclopedia of Applied Physics

How to Cite

Arthur, J. R. 2003. Thin-film Deposition. Encyclopedia of Applied Physics. .

Author Information

  1. Oregon State University, Corvallis, Oregon, U.S.A.

Publication History

  1. Published Online: 15 APR 2003