Standard Article

Optical Metrology

  1. Peter deGroot

Published Online: 15 OCT 2004

DOI: 10.1002/3527600434.eap638

Encyclopedia of Applied Physics

Encyclopedia of Applied Physics

How to Cite

deGroot, P. 2004. Optical Metrology. Encyclopedia of Applied Physics. .

Author Information

  1. Zygo Corporation, Middlefield, Connecticut, USA

Publication History

  1. Published Online: 15 OCT 2004


The article reviews the optical measurement of shape, texture, geometric dimensions, and position of objects, with applications ranging from stage metrology to optical comparators. An emphasis is placed on mechanical and geometric metrology, as opposed to remote sensing. The underlying technologies rely therefore on interferometry, triangulation, and time of flight to determine distances and lengths, as well as those object features accessible to length measurement, including, for example, form and roughness.


  • metrology;
  • measurement;
  • optics;
  • optical testing;
  • microscopy;
  • interferometry