Published Online: 15 OCT 2004
Copyright © 2003 by WILEY-VCH Verlag GmbH & Co KGaA. All rights reserved.
Encyclopedia of Applied Physics
How to Cite
deGroot, P. 2004. Optical Metrology. Encyclopedia of Applied Physics. .
- Published Online: 15 OCT 2004
The article reviews the optical measurement of shape, texture, geometric dimensions, and position of objects, with applications ranging from stage metrology to optical comparators. An emphasis is placed on mechanical and geometric metrology, as opposed to remote sensing. The underlying technologies rely therefore on interferometry, triangulation, and time of flight to determine distances and lengths, as well as those object features accessible to length measurement, including, for example, form and roughness.
- optical testing;