Chapter 21. Nanolithography and Nanomanipulation

  1. Prof. Dr. C. N. R. Rao2,
  2. Prof. Dr. h.c. mult. Achim Müller3 and
  3. Prof. Dr. A. K. Cheetham Director4
  1. A. K. Raychaudhuri

Published Online: 28 JAN 2005

DOI: 10.1002/352760247X.ch21

The Chemistry of Nanomaterials: Synthesis, Properties and Applications

The Chemistry of Nanomaterials: Synthesis, Properties and Applications

How to Cite

Raychaudhuri, A. K. (2004) Nanolithography and Nanomanipulation, in The Chemistry of Nanomaterials: Synthesis, Properties and Applications (eds C. N. R. Rao, A. Müller and A. K. Cheetham), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, FRG. doi: 10.1002/352760247X.ch21

Editor Information

  1. 2

    Chemistry and Physics of Materials Unit and CSIR Centre of Excellence in Chemistry, Jawaharlal Nehru Centre for Advanced, Scientific Research, Jakkur P.O., Bangalore 560 064, India

  2. 3

    Faculty of Chemistry, University of Bielefeld, Postfach 10 01 31, D-33501 Bielefeld, Germany

  3. 4

    Materials Research Laboratory, University of California, Santa Barbara, CA 93106-5121, USA

Author Information

  1. Department of Physics, Indian Institute of Science, Bangalore-560012, India

Publication History

  1. Published Online: 28 JAN 2005
  2. Published Print: 28 JAN 2004

ISBN Information

Print ISBN: 9783527306862

Online ISBN: 9783527602476

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Keywords:

  • nanolithography;
  • nanomanipulation;
  • polycarbonate etched track templates;
  • alumina membrane;
  • block copolymers;
  • electrodeposition;
  • sol-gel method;
  • CVD method;
  • dip pen nanolithography;
  • scanning probe microscopy;
  • nano-electromechanical systems

Summary

  • Introduction

  • Template Fabrication

    • Polycarbonate Etched Track Templates

    • Fabrication of Anodized Alumina Membrane

    • Anodized Alumina Membrane as a Mask for Physical Vapor Deposition

    • Templates Made in Block Copolymers

  • Fabrication of Nanostructures in the Templates

    • Electrodeposition

    • Sol–Gel Method

    • CVD Method

  • Scanning Probe Based Anodic Oxidation as a Tool for the Fabrication of Nanostructures

    • Oxidation of Metallic Substrates

    • Oxidation of Semiconducting Substrates

  • Use of Scanning Probe Microscopy in Dip Pen Nanolithography

  • Use of Scanning Probe Microscopy in Nanomanipulation

  • Nano-Electromechanical Systems

  • Acknowledgements

  • References