Chapter 18. Plasmas

  1. Kenneth A. Jackson

Published Online: 21 JUN 2005

DOI: 10.1002/3527603891.ch18

Kinetic Processes: Crystal Growth, Diffusion, and Phase Transitions in Materials

Kinetic Processes: Crystal Growth, Diffusion, and Phase Transitions in Materials

How to Cite

Jackson, K. A. (2004) Plasmas, in Kinetic Processes: Crystal Growth, Diffusion, and Phase Transitions in Materials, Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, FRG. doi: 10.1002/3527603891.ch18

Author Information

  1. Arizona Materials Laboratory, Department of Materials Science and Engineering, University of Arizona, 3675 East Via Alcalde, Tucson, AZ 85718, USA

Publication History

  1. Published Online: 21 JUN 2005
  2. Published Print: 27 JUL 2004

ISBN Information

Print ISBN: 9783527306947

Online ISBN: 9783527603893

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Keywords:

  • kinetic processes;
  • plasmas;
  • direct current (DC) plasmas;
  • radio-frequency plasmas;
  • plasma etching;
  • plasma reactors;
  • magnetron sputtering;
  • electron cyclotron resonance;
  • ion milling

Summary

This chapter contains sections titled:

  • Direct Current (DC) Plasmas

  • Radio-Frequency Plasmas

  • Plasma Etching

  • Plasma Reactors

  • Magnetron Sputtering

  • Electron Cyclotron Resonance

  • Ion Milling