Chapter 9. Radio-Frequency Driven Ion Sources

  1. Ian G. Brown
  1. Ka-Ngo Leung

Published Online: 4 JUL 2005

DOI: 10.1002/3527603956.ch9

The Physics and Technology of Ion Sources, Second Edition

The Physics and Technology of Ion Sources, Second Edition

How to Cite

Leung, K.-N. (2004) Radio-Frequency Driven Ion Sources, in The Physics and Technology of Ion Sources, Second Edition (ed I. G. Brown), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, FRG. doi: 10.1002/3527603956.ch9

Editor Information

  1. Lawrence Berkeley National Laboratory, Berkeley, California, USA

Author Information

  1. Lawrence Berkeley National Laboratory, Berkeley, California; USA

Publication History

  1. Published Online: 4 JUL 2005
  2. Published Print: 25 AUG 2004

ISBN Information

Print ISBN: 9783527404100

Online ISBN: 9783527603954

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Keywords:

  • ion sources;
  • radio-frequency driven ion sources;
  • capacitively coupled RF sources;
  • inductively coupled RF sources;
  • external RF antenna;
  • internal RF antenna;
  • ion beam brightness;
  • multicusp RF source;
  • RF ion sources

Summary

This chapter contains sections titled:

  • Introduction

  • Capacitively Coupled RF Sources

  • Inductively Coupled RF Sources

    • Source Operation with an External RF Antenna

    • Multicusp Source Operation with Internal RF Antenna

    • Increasing the Ion Beam Brightness of a Multicusp RF Source with Internal Antenna

    • Multicusp Source Operation with External RF Antenna

  • Applications of RF Ion Sources