Chapter 8. Bridging the Gap between Nanometer and Meter

  1. Prof. Dr. Hans-Jörg Fecht2,3 and
  2. Dr. Matthias Werner4
  1. Matthias Meyer,
  2. Jürgen Koglin and
  3. Thomas Fries

Published Online: 13 JUL 2005

DOI: 10.1002/3527604111.ch8

The Nano-Micro Interface: Bridging the Micro and Nano Worlds

The Nano-Micro Interface: Bridging the Micro and Nano Worlds

How to Cite

Meyer, M., Koglin, J. and Fries, T. (2004) Bridging the Gap between Nanometer and Meter, in The Nano-Micro Interface: Bridging the Micro and Nano Worlds (eds H.-J. Fecht and M. Werner), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, FRG. doi: 10.1002/3527604111.ch8

Editor Information

  1. 2

    University of Ulm, Faculty of Engineering, Materials Division, Albert-Einstein-Allee 47, 89081 Ulm, Germany

  2. 3

    Forschungszentrum Karlsruhe, Institute of Nanotechnology (INT), P.O. Box 3640, 76021 Karlsruhe, Germany

  3. 4

    NMTC, Soorstrasse 86, 14050 Berlin, Germany

Author Information

  1. FRT, Fries Research & Technology GmbH, Friedrich-Ebert-Strasse, 51429 Bergisch Gladbach, Germany

Publication History

  1. Published Online: 13 JUL 2005
  2. Published Print: 23 SEP 2004

ISBN Information

Print ISBN: 9783527309788

Online ISBN: 9783527604111

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Keywords:

  • nano–micro interface;
  • measurement;
  • structured Si-wafer;
  • bump measurements;
  • LED housing;
  • film thickness measurement;
  • elastic properties

Summary

This chapter contains sections titled:

  • Introduction

  • Motivation

  • Bridging the Gap

  • Examples of Measurement

    • Structured Si Wafer

    • Bump Measurements

    • LED Housing

    • Film Thickness Measurement

    • Elastic Properties with AFAM