Chapter 7. Structural Analysis of Diamond-Like Carbon Films Deposited by RF (13.56 MHz) in a Methane Gas Plasma Atmosphere

  1. Prof. Riccardo d'Agostino4,
  2. Prof. Pietro Favia4,
  3. Dr. Christian Oehr5 and
  4. Prof. Michael R. Wertheimer6
  1. M. Ouchabane1,
  2. M. Aoucher2,
  3. A. Sekkal1,
  4. K. Henda3 and
  5. H. Lahmar3

Published Online: 28 OCT 2005

DOI: 10.1002/3527605584.ch7

Plasma Processes and Polymers

Plasma Processes and Polymers

How to Cite

Ouchabane, M., Aoucher, M., Sekkal, A., Henda, K. and Lahmar, H. (2005) Structural Analysis of Diamond-Like Carbon Films Deposited by RF (13.56 MHz) in a Methane Gas Plasma Atmosphere, in Plasma Processes and Polymers (eds R. d'Agostino, P. Favia, C. Oehr and M. R. Wertheimer), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, FRG. doi: 10.1002/3527605584.ch7

Editor Information

  1. 4

    Dipartimento di Chimica, Universita di Bari, Italy

  2. 5

    Fraunhofer Institute for Interfacial, Engineering and Biotechnology IGB, Stuttgart, Germany

  3. 6

    Department of Engineering Physics, Ecole Polytechnique, Montreal, Canada

Author Information

  1. 1

    Centre de Développement des Technologies Avancées, Division des milieux ionisés & Lasers, Alger, Algérie, France

  2. 2

    Laboratoire de physique des matériaux, Equipe couches minces et semiconducteurs, Faculté de Physique, El Alia, Bab-ezzouar, Alger, Algérie, France

  3. 3

    Centre de Développement des Technologies Avancées, Division des milieux ionisés & Lasers, Baba Hassan, Alger, Algérie, France

Publication History

  1. Published Online: 28 OCT 2005
  2. Published Print: 17 FEB 2005

ISBN Information

Print ISBN: 9783527404872

Online ISBN: 9783527605583

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Keywords:

  • plasma processes;
  • polymers;
  • plasma deposition;
  • thin films;
  • structural analysis;
  • diamond-like carbon films;
  • deposited by RF;
  • methane gas plasma atmosphere

Summary

This chapter contains sections titled:

  • Introduction

  • Experimental Procedure

    • Deposition Apparatus

    • Experimental Conditions

  • Results and Discussions

    • X-ray Auger Electron Spectroscopy (XAES)

    • Electron Energy Loss Spectroscopy (EELS)

  • Conclusion