Thickness Distribution of Nitride Coatings Deposited by Cathodic Arc Evaporation and the Effect of Increased Working Gas Pressure

  1. Prof. Dr. M. Rühle4 and
  2. Prof. Dr. H. Gleiter5
  1. Martin Balzer1,
  2. Hermann A. Jehn1,
  3. Clive Davies2,
  4. Peter Hatto2 and
  5. Francesca Passaretti3

Published Online: 23 DEC 2005

DOI: 10.1002/352760622X.ch2

Interface Controlled Materials, Volume 9

Interface Controlled Materials, Volume 9

How to Cite

Balzer, M., Jehn, H. A., Davies, C., Hatto, P. and Passaretti, F. (2000) Thickness Distribution of Nitride Coatings Deposited by Cathodic Arc Evaporation and the Effect of Increased Working Gas Pressure, in Interface Controlled Materials, Volume 9 (eds M. Rühle and H. Gleiter), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, FRG. doi: 10.1002/352760622X.ch2

Editor Information

  1. 4

    Max-Planck-Institut für Metallforschung, Seestraße 92, 70174 Stuttgart, Germany

  2. 5

    Forschungszentrum Karlsruhe, Postfach 3640, 76021 Karlsruhe, Germany

Author Information

  1. 1

    FEM, Schwäbisch Gmünd, Germany

  2. 2

    Multi-Arc Ltd., Durham, UK

  3. 3

    CNR Te.M.P.E., Milano, Italy

Publication History

  1. Published Online: 23 DEC 2005
  2. Published Print: 27 JUN 2000

Book Series:

  1. EUROMAT 99

ISBN Information

Print ISBN: 9783527301911

Online ISBN: 9783527606221

SEARCH

Keywords:

  • interface controlled materials;
  • nitride coatings;
  • thickness distribution;
  • deposition by cathodic arc evaporation

Summary

In the last decade the demand for hard, low friction and protective coatings with enhanced properties has been growing. In this field the PVD deposition techniques have been found to bring the best results. Two facts however still limit the application: (i) long total process time (pumping down, substrate heating, coating and substrate cooling) and expansive equipment, both resulting in high costs, and (ii) line-of-sight process complicating the coating of 3-D and large parts. In response to the industry demands a Brite-EuRam project was started aiming to cost reduction and widening the field for the use of PVD vacuum coating techniques.

The present paper reports on one important part of this project, dealing with enhancing the uniformity of the coating thickness and quality on 3-dimensionally shaped substrates. The experimental depositions were performed using reactive arc evaporation of Ti and TiAl to deposit TiN and TiAlN on steel model substrates and drills.