Synthesis of Nanostructured Carbon Films Deposited by Supersonic Cluster Beam

  1. Prof. Dr. M. Rühle2 and
  2. Prof. Dr. H. Gleiter3
  1. E. Barborini,
  2. P. Piseri,
  3. L. Diederich,
  4. A. Podesta',
  5. C. Lenardi and
  6. P. Milani

Published Online: 23 DEC 2005

DOI: 10.1002/352760622X.ch47

Interface Controlled Materials, Volume 9

Interface Controlled Materials, Volume 9

How to Cite

Barborini, E., Piseri, P., Diederich, L., Podesta', A., Lenardi, C. and Milani, P. (2000) Synthesis of Nanostructured Carbon Films Deposited by Supersonic Cluster Beam, in Interface Controlled Materials, Volume 9 (eds M. Rühle and H. Gleiter), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, FRG. doi: 10.1002/352760622X.ch47

Editor Information

  1. 2

    Max-Planck-Institut für Metallforschung, Seestraße 92, 70174 Stuttgart, Germany

  2. 3

    Forschungszentrum Karlsruhe, Postfach 3640, 76021 Karlsruhe, Germany

Author Information

  1. INFM-Dipartimento di Fisica, Universita' di Milano, Italy

Publication History

  1. Published Online: 23 DEC 2005
  2. Published Print: 27 JUN 2000

Book Series:

  1. EUROMAT 99

ISBN Information

Print ISBN: 9783527301911

Online ISBN: 9783527606221

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Keywords:

  • interface controlled materials;
  • nanotechnology;
  • nanostructured carbon films;
  • synthesis;
  • supersonic cluster beam

Summary

We present the principles of an approach for the synthesis of nanostructured films based on the deposition of supersonic cluster beams. Using a novel pulsed microplasma cluster source, intense and stable cluster beams can be produced allowing film deposition rates up to several nm/min over large surfaces. By separation effects typical of supersonic beams it is possible to select different mass distributions of neutral clusters in the beam, allowing the deposition of thin films with controlled nanostructure. Carbon thin films with interesting functional and structural properties have been deposited by using different precursor clusters.