Correlation between Growth Induced Structure, Stress and Relaxation in Thin Films

  1. Prof. Dr. M. Rühle3 and
  2. Prof. Dr. H. Gleiter4
  1. Frank Hubenthal1,
  2. Thomas Conradi1,
  3. Klaus Röll1 and
  4. Tomasz Stobiecki2

Published Online: 23 DEC 2005

DOI: 10.1002/352760622X.ch7

Interface Controlled Materials, Volume 9

Interface Controlled Materials, Volume 9

How to Cite

Hubenthal, F., Conradi, T., Röll, K. and Stobiecki, T. (2000) Correlation between Growth Induced Structure, Stress and Relaxation in Thin Films, in Interface Controlled Materials, Volume 9 (eds M. Rühle and H. Gleiter), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, FRG. doi: 10.1002/352760622X.ch7

Editor Information

  1. 3

    Max-Planck-Institut für Metallforschung, Seestraße 92, 70174 Stuttgart, Germany

  2. 4

    Forschungszentrum Karlsruhe, Postfach 3640, 76021 Karlsruhe, Germany

Author Information

  1. 1

    Universität Gh Kassel, Germany

  2. 2

    University of Mining and Metallurgy, Kraków, Poland

Publication History

  1. Published Online: 23 DEC 2005
  2. Published Print: 27 JUN 2000

Book Series:

  1. EUROMAT 99

ISBN Information

Print ISBN: 9783527301911

Online ISBN: 9783527606221

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Keywords:

  • interface controlled materials;
  • thin films;
  • growths induced structure;
  • stress;
  • relaxation

Summary

Stresses in thin films are well known phenomena and one can find various explanations on the origin of the stresses, but the effect of the layer growth induced structure, i.e. columnar or oblique angle, is very often neglected. In this contribution we present two different examples which show the important influence of the growth induced film structure (briefly: structure) on internal stresses and stress relaxation processes.