Microstructurable Glasses and Technologies

  1. Dr. K. Grassie2,
  2. Prof. Dr. E. Teuckhoff3,
  3. Prof. Dr. G. Wegner4,
  4. Prof. Dr. J. Hausselt5 and
  5. Prof. Dr. H. Hanselka6
  1. Alf Harnisch and
  2. Dagmar Hülsenberg

Published Online: 27 APR 2006

DOI: 10.1002/3527607420.ch69

Functional Materials, Volume 13

Functional Materials, Volume 13

How to Cite

Harnisch, A. and Hülsenberg, D. (2000) Microstructurable Glasses and Technologies, in Functional Materials, Volume 13 (eds K. Grassie, E. Teuckhoff, G. Wegner, J. Hausselt and H. Hanselka), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, FRG. doi: 10.1002/3527607420.ch69

Editor Information

  1. 2

    Philips Forschungslaboratorium, Postfach 500145, 52085 Aachen, Germany

  2. 3

    Siemens AG, Postfach 3240, 91050 Erlangen, Germany

  3. 4

    Max-Planck-Institut für Polymerforschung, Ackermannweg 10, 55128 Mainz, Germany

  4. 5

    Forschungszentrum Karlsruhe, Postfach 3640, 76201 Karlsruhe, Germany

  5. 6

    Institut für Mechanik, Otto-von-Guericke-Universität Magdeburg, Universitätsplatz 2, 39160 Magdeburg, Germany

Author Information

  1. Technical University of Ilmenau, Germany

Publication History

  1. Published Online: 27 APR 2006
  2. Published Print: 27 JUN 2000

Book Series:

  1. EUROMAT 99

ISBN Information

Print ISBN: 9783527302543

Online ISBN: 9783527607426

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Keywords:

  • functional materials;
  • microstructurable glasses;
  • technologies;
  • Li2O-Al2O3-SiO2

Summary

Special glasses from the system Li2O-Al2O3-SiO2 are microstructurable by a UV-lithographic process. If you use the basic process it is possible to prepare two dimensional through structures in a glass wafer.

A new exposure technique allows a 3D etching process in photosensitive glass. A pattern with a defined width and mesh are made in a chromium layer on vitreous silica. By use of these mask a different UV-intensity results in the glass during the exposure. Due to the different intensities, the exposure of various depths is possible.

The advantage of this technology is the production of structures with two dimensional free design, various depths and a defined angle of walls in one process.