Material Requirements in Hot Embossing of Microstructures

  1. Dr. K. Grassie2,
  2. Prof. Dr. E. Teuckhoff3,
  3. Prof. Dr. G. Wegner4,
  4. Prof. Dr. J. Hausselt5 and
  5. Prof. Dr. H. Hanselka6
  1. K. Feit,
  2. K. D. Müller and
  3. M. Heckele

Published Online: 27 APR 2006

DOI: 10.1002/3527607420.ch76

Functional Materials, Volume 13

Functional Materials, Volume 13

How to Cite

Feit, K., Müller, K. D. and Heckele, M. (2000) Material Requirements in Hot Embossing of Microstructures, in Functional Materials, Volume 13 (eds K. Grassie, E. Teuckhoff, G. Wegner, J. Hausselt and H. Hanselka), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, FRG. doi: 10.1002/3527607420.ch76

Editor Information

  1. 2

    Philips Forschungslaboratorium, Postfach 500145, 52085 Aachen, Germany

  2. 3

    Siemens AG, Postfach 3240, 91050 Erlangen, Germany

  3. 4

    Max-Planck-Institut für Polymerforschung, Ackermannweg 10, 55128 Mainz, Germany

  4. 5

    Forschungszentrum Karlsruhe, Postfach 3640, 76201 Karlsruhe, Germany

  5. 6

    Institut für Mechanik, Otto-von-Guericke-Universität Magdeburg, Universitätsplatz 2, 39160 Magdeburg, Germany

Author Information

  1. Forschungszentrum Karlsruhe, Germany

Publication History

  1. Published Online: 27 APR 2006
  2. Published Print: 27 JUN 2000

Book Series:

  1. EUROMAT 99

ISBN Information

Print ISBN: 9783527302543

Online ISBN: 9783527607426

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Keywords:

  • functional materials;
  • hot embossing of microstructures;
  • material requirements;
  • thermoplastic deformation;
  • microstructure technology

Summary

Plastic microstructures may be produced by thermoplastic deformation. Very good results in terms of highly complex LIGA microstructures with high aspect ratios and small roughness of the lateral walls are achieved by the hot embossing process. Selection of adequate process parameters requires an analysis of the thermal and thermomechanical material behavior of the semi-finished plastic products used as well as equipment-related technical studies. Using an amorphous plastic material (PMMA) and a semi-crystalline plastic material (POM), basic studies are performed with regard to the molding behavior of thermoplastic semi-finished products during hot embossing in microstructure technology.