Silicon Moulds for Micro-Injection Moulding Techniques

  1. Dr. K. Grassie4,
  2. Prof. Dr. E. Teuckhoff5,
  3. Prof. Dr. G. Wegner6,
  4. Prof. Dr. J. Hausselt7 and
  5. Prof. Dr. H. Hanselka8
  1. Andreas Menz1,
  2. Wolfgang Benecke1,
  3. Thanh Vinh Duong2,
  4. Hans-Dieter Kunze2 and
  5. Ralf Höper3

Published Online: 27 APR 2006

DOI: 10.1002/3527607420.ch79

Functional Materials, Volume 13

Functional Materials, Volume 13

How to Cite

Menz, A., Benecke, W., Duong, T. V., Kunze, H.-D. and Höper, R. (2000) Silicon Moulds for Micro-Injection Moulding Techniques, in Functional Materials, Volume 13 (eds K. Grassie, E. Teuckhoff, G. Wegner, J. Hausselt and H. Hanselka), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, FRG. doi: 10.1002/3527607420.ch79

Editor Information

  1. 4

    Philips Forschungslaboratorium, Postfach 500145, 52085 Aachen, Germany

  2. 5

    Siemens AG, Postfach 3240, 91050 Erlangen, Germany

  3. 6

    Max-Planck-Institut für Polymerforschung, Ackermannweg 10, 55128 Mainz, Germany

  4. 7

    Forschungszentrum Karlsruhe, Postfach 3640, 76201 Karlsruhe, Germany

  5. 8

    Institut für Mechanik, Otto-von-Guericke-Universität Magdeburg, Universitätsplatz 2, 39160 Magdeburg, Germany

Author Information

  1. 1

    Institute for Microsensors, -Actuators and -Systems, Postfach 330440, 28334 Bremen, Germany

  2. 2

    Fraunhofer-Institute for Manufacturing and Advanced Materials, Bremen, Germany

  3. 3

    Materials Science and Technology Cooperation, Bremen, Germany

Publication History

  1. Published Online: 27 APR 2006
  2. Published Print: 27 JUN 2000

Book Series:

  1. EUROMAT 99

ISBN Information

Print ISBN: 9783527302543

Online ISBN: 9783527607426

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Keywords:

  • functional materials;
  • micro-injection moulding techniques;
  • silicon moulds;
  • WC-Co

Summary

The fabrication of silicon moulds for micro injection moulding techniques is described. These are made by means of a silicon deep etching process and can be used for the moulding of many materials, such as polymers, ceramics, and metals. This paper shows new results of metallic (WC-Co) microparts with superior thermal and mechanical properties.