Chapter 10. Femtosecond Laser Microfabrication of Photonic Crystals

  1. Hiroaki Misawa and
  2. Saulius Juodkazis
  1. Vygantas Mizeikis1,
  2. Shigeki Matsuo2,
  3. Saulius Juodkazis1 and
  4. Hiroaki Misawa1

Published Online: 29 JUN 2006

DOI: 10.1002/352760846X.ch10

3D Laser Microfabrication: Principles and Applications

3D Laser Microfabrication: Principles and Applications

How to Cite

Mizeikis, V., Matsuo, S., Juodkazis, S. and Misawa, H. (2006) Femtosecond Laser Microfabrication of Photonic Crystals, in 3D Laser Microfabrication: Principles and Applications (eds H. Misawa and S. Juodkazis), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, FRG. doi: 10.1002/352760846X.ch10

Editor Information

  1. Research Institute for Electronic Science, Hokkaido University, North 21 – West 10, CRIS Bldg., Sapporo 001-0021, Japan

Author Information

  1. 1

    Research Institute for Electronic Science, Hokkaido University, North 21 – West 10, CRIS Bldg., Sapporo 001-0021, Japan

  2. 2

    Graduate School of Engineering, Department of Ecosystems Engineering, The University of Tokushima, 2-1 Minamijosanjima, 770-8606 Tokushima, Japan

Publication History

  1. Published Online: 29 JUN 2006
  2. Published Print: 6 JUN 2006

ISBN Information

Print ISBN: 9783527310555

Online ISBN: 9783527608461

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Keywords:

  • laser microfabrication;
  • photonic crystals;
  • photomodification;
  • direct laser writing;
  • optical damage;
  • lithography;
  • woodpile architecture;
  • spiral architecture;
  • periodic light intensity patterns

Summary

This chapter contains sections titled:

  • Microfabrication of Photonic Crystals by Ultrafast Lasers

    • Nonlinear Absorption of Spatially Nonuniform Laser Fields

    • Mechanisms of Photomodification

  • Photonic Crystals Obtained by Direct Laser Writing

    • Fabrication by Optical Damage in Inorganic Glasses

    • Fabrication by Optical Damage in Organic Glasses

    • Lithography by Two-photon Solidification in Photo-curing Resins

    • Lithography in Organic Photoresists

      • Structures with Woodpile Architecture

      • Structures with Spiral Architecture

  • Lithography by Multiple-beam Interference

    • Generation of Periodic Light Intensity Patterns

    • Practical Implementation of Multiple-beam Interference Lithography

    • Lithographic Recording of Periodic Structures by Multiple-beam Interference

      • Two-dimensional Structures

      • Three-dimensional Structures

  • Conclusions