Chapter 7. Photophysics and Photochemistry of Ultrafast Laser Materials Processing

  1. Hiroaki Misawa and
  2. Saulius Juodkazis
  1. Richard F. Haglund Jr.

Published Online: 29 JUN 2006

DOI: 10.1002/352760846X.ch7

3D Laser Microfabrication: Principles and Applications

3D Laser Microfabrication: Principles and Applications

How to Cite

Haglund, R. F. (2006) Photophysics and Photochemistry of Ultrafast Laser Materials Processing, in 3D Laser Microfabrication: Principles and Applications (eds H. Misawa and S. Juodkazis), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, FRG. doi: 10.1002/352760846X.ch7

Editor Information

  1. Research Institute for Electronic Science, Hokkaido University, North 21 – West 10, CRIS Bldg., Sapporo 001-0021, Japan

Author Information

  1. Vanderbilt University, Department of Physics and Astronomy and W M Keck Free Electron Laser Center, Box 1807, Station B 6301 Stevenson, Nashville, TN 37235, USA

Publication History

  1. Published Online: 29 JUN 2006
  2. Published Print: 6 JUN 2006

ISBN Information

Print ISBN: 9783527310555

Online ISBN: 9783527608461

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Keywords:

  • photophysics;
  • photochemistry of ultrafast laser materials processing;
  • electronic excitation;
  • metals;
  • semiconductors;
  • vibrational excitation;
  • shock waves;
  • laser micromachining;
  • pulsed laser deposition

Summary

This chapter contains sections titled:

  • Introduction and Motivation

  • Ultrafast Laser Materials Interactions: Electronic Excitation

    • Metals: The Two-temperature Model

    • Semiconductors

      • Ultrafast Laser-induced Melting in Semiconductors

      • Ultrafast Laser Ablation in Semiconductors

      • Theoretical Studies of Femtosecond Laser Interactions with Semiconductors

    • Insulators

      • Ultrafast Ablation of Insulators

      • Self-focusing of Ultrashort Pulses for Three-dimensional Structures

      • Color-center Formation by Femtosecond Laser Irradiation

  • Ultrafast Laser-materials Interaction: Vibrational Excitation

    • Ablation of Inorganic Materials by Resonant Vibrational Excitation

    • Ablation of Organic Materials by Resonant Vibrational Excitation

  • Photochemistry in Femtosecond Laser-materials Interactions

    • Sulfidation of Silicon Nanostructures by Femtosecond Irradiation

    • Nitridation of Metal Surfaces Using Picosecond MIR Radiation

  • Photomechanical Effects at Femtosecond Timescales

    • Shock Waves, Phase Transitions and Tribology

    • Coherent Phonon Excitations in Metals

    • Ultrafast Laser-induced Forward Transfer (LIFT)

  • Pulsed Laser Deposition

    • Near-infrared Pulsed Laser Deposition

    • Infrared Pulsed Laser Deposition of Organic Materials on Micro- and Nanostructures

  • Future Trends in Ultrafast Laser Micromachining

    • Ultrashort-pulse Materials Modification at High Pulse-repetition Frequency

    • Pulsed Laser Deposition at High Pulse-repetition Frequency

      • Deposition of Inorganic Thin Films

      • Deposition of Organic Thin Films

    • Picosecond Processing of Carbon Nanotubes

    • Sub-micron Parallel-process Patterning of Materials with Ultraviolet Lasers

  • Summary and Conclusions