Chapter 11. Thin-film Transistor Fabrication by Digital Lithography

  1. Dr. Hagen Klauk
  1. William S. Wong,
  2. Jürgen H. Daniel,
  3. Michael L. Chabinyc,
  4. Ana Claudia Arias,
  5. Steven E. Ready,
  6. René Lujan

Published Online: 28 AUG 2006

DOI: 10.1002/3527608753.ch11

Book Title

Organic Electronics: Materials, Manufacturing and Applications

Organic Electronics: Materials, Manufacturing and Applications

Additional Information

How to Cite

Wong, W. S., Daniel, J. H., Chabinyc, M. L., Arias, A. C., Ready, S. E. and Lujan, R. (2006) Thin-film Transistor Fabrication by Digital Lithography, in Organic Electronics: Materials, Manufacturing and Applications (ed H. Klauk), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, FRG. doi: 10.1002/3527608753.ch11

Editor Information

  1. Max Planck Institute for Solid State Research, Heisenbergstr. 1, 70569 Stuttgart, Germany

Author Information

  1. Electronic Materials and Devices Laboratory, Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, CA 94304, USA

Publication History

  1. Published Online: 28 AUG 2006
  2. Published Print: 22 MAY 2006

ISBN Information

Print ISBN: 9783527312641

Online ISBN: 9783527608751

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CHAPTER TOOLS

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Keywords:

  • organic electronics;
  • manufacturing;
  • thin-film transistor (TFT) fabrication;
  • digital lithography;
  • jet-printed patterning;
  • TFTs on flexible substrates;
  • display applications;
  • print-patterned backplanes

Summary

This chapter contains sections titled:

  • Introduction

  • Jet-printed Patterning for Thin-film Transistor Processing

    • Introduction

    • Jet-printed Phase-change Etch Masks

  • Digital Lithography

    • Digital Lithography for TFT Device Fabrication

    • Thin-film Transistor Device Structures

      • Amorphous Silicon TFTs

      • Polymeric TFTs by Digital Lithography

    • Thin-film Transistor Device Characteristics

      • a-Si:H TFTs

      • Printed Polymeric TFTs

  • TFTs on Flexible Substrates

    • Introduction

    • TFT Pixel Design Considerations

    • Digital Lithography for Flexible Backplanes

  • Display Applications with Print-patterned Backplanes

  • Conclusions

  • Acknowledgments

  • References

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