Chapter 9. Organic Vapor Phase Deposition

  1. Dr. Hagen Klauk
  1. Michael Heuken and
  2. Nico Meyer

Published Online: 28 AUG 2006

DOI: 10.1002/3527608753.ch9

Organic Electronics: Materials, Manufacturing and Applications

Organic Electronics: Materials, Manufacturing and Applications

How to Cite

Heuken, M. and Meyer, N. (2006) Organic Vapor Phase Deposition, in Organic Electronics: Materials, Manufacturing and Applications (ed H. Klauk), Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, FRG. doi: 10.1002/3527608753.ch9

Editor Information

  1. Max Planck Institute for Solid State Research, Heisenbergstr. 1, 70569 Stuttgart, Germany

Author Information

  1. AIXTRON AG, Kackertstr. 15–17, 52072 Aachen, Germany

Publication History

  1. Published Online: 28 AUG 2006
  2. Published Print: 22 MAY 2006

ISBN Information

Print ISBN: 9783527312641

Online ISBN: 9783527608751

SEARCH

Keywords:

  • organic electronics;
  • manufacturing;
  • organic vapor phase deposition (OVPD);
  • deposition of organic thin films;
  • electronic devices by OVPD;
  • full-color OLED displays;
  • material properties;
  • organic molecules;
  • use in OVPD

Summary

This chapter contains sections titled:

  • Introduction

    • The Principle of OVPD

    • Close Coupled Showerhead Technology

  • Deposition of Organic Thin Films

    • Process Control in OVPD

    • Co-deposition and Doping in OVPD

    • Controlled Morphology and Layer Interfaces in OVPD

  • Electronic Devices by OVPD

    • OLEDs Made by OVPD

    • Organic Photovoltaics by OVPD

    • Organic Thin-film Transistors by OVPD

  • Full-color OLED Displays

    • Micropatterning by use of Shadow Masks

    • Mask-less Processes

  • Material Properties of Organic Molecules for Use in OVPD

  • Summary

  • Acknowledgment

  • References