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Ion Scattering Spectroscopy in Analysis of Surfaces


  1. Robert A. Langley

Published Online: 15 SEP 2006

DOI: 10.1002/9780470027318.a2508

Encyclopedia of Analytical Chemistry

Encyclopedia of Analytical Chemistry

How to Cite

Langley, R. A. 2006. Ion Scattering Spectroscopy in Analysis of Surfaces. Encyclopedia of Analytical Chemistry. .

Author Information

  1. Kingston, TN, USA

Publication History

  1. Published Online: 15 SEP 2006


Ion scattering spectroscopy (ISS) is used to analyze materials for their atomic constituents for depths from a monolayer to many microns. The probing depth and depth resolution are mainly determined by the energy and mass of the projectile. The projectile energy ranges from several thousand to many million electron-volts. For ISS there are many options for analysis, e.g. scattered incident projectiles, knock-on target atoms, reactants from nuclear reactions between the projectile and target atom, and X-rays from excitation of target atoms by the projectiles. There are also numerous experimental techniques for studying various particular material characteristics, e.g. crystal structure, crystal damage, lattice deformation, and impurity content and location. Each of these areas is addressed, as well as the equipment needed for their implementation. Review articles and books on specific relevant subjects are noted, as well as data analysis techniques and computer analysis and simulation programs.