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X-Ray Photoelectron and Auger Electron Spectroscopy

X-Ray Photoelectron Spectroscopy and Auger Electron Spectroscopy

  1. Noel H. Turner

Published Online: 15 SEP 2006

DOI: 10.1002/9780470027318.a6702

Encyclopedia of Analytical Chemistry

Encyclopedia of Analytical Chemistry

How to Cite

Turner, N. H. 2006. X-Ray Photoelectron and Auger Electron Spectroscopy. Encyclopedia of Analytical Chemistry. .

Author Information

  1. Springfield, USA

Publication History

  1. Published Online: 15 SEP 2006


The use of X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES) to analyze the surface composition and chemical environment of solids has been well established since about the early 1970s. These approaches find many applications in both basic and applied scientific investigations. The basic principles, i.e. surface sensitivity, the experimental observations employing these procedures, and the working methods, are described. The instrumentation utilized with the commonly available equipment for these approaches is summarized also.