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Micro-X-Ray Fluorescence

X-Ray Spectrometry

  1. Kouichi Tsuji

Published Online: 15 JUN 2010

DOI: 10.1002/9780470027318.a9067

Encyclopedia of Analytical Chemistry

Encyclopedia of Analytical Chemistry

How to Cite

Tsuji, K. 2010. Micro-X-Ray Fluorescence. Encyclopedia of Analytical Chemistry. .

Author Information

  1. Osaka City University, Graduate School of Engineering, Osaka, Japan

Publication History

  1. Published Online: 15 JUN 2010


X-ray fluorescence (XRF) is a well-known analytical technique that enables nondestructive elemental quantitative analysis of various kinds of samples without requiring the use of high vacuum. In conventional XRF, the analysis area on the sample is typically 10 mm in diameter. However, advances in X-ray technology of X-ray sources, X-ray optics, and X-ray detectors have changed the performance of XRF analysis. X-ray microbeams of a few micrometers up to several tens of micrometers have been obtained with a reasonable intensity for X-ray elemental analysis in the laboratory. The use of such a micro-X-ray beam enables XRF analysis of small regions. This micro-XRF method opens new application fields for XRF analysis. In addition, scanning the sample enables the production of two-dimensional XRF images. This method of chemical X-ray imaging provides very useful information. In addition, a confocal configuration for X-ray excitation and X-ray detection also provides the opportunity for three-dimensional XRF images. These topics related to recent developments in micro-XRF are introduced.


  • X-Ray fluorescence;
  • micro-XRF;
  • micro-X-Ray beam;
  • capillary optics;
  • polycapillary;
  • confocal setup;
  • 3D-XRF;
  • elemental mapping;
  • chemical imaging