Chapter 10. Concluding Remarks

  1. Salvatore Baglio1,
  2. Salvatore Castorina2 and
  3. Nicolò Savalli1

Published Online: 18 JUL 2008

DOI: 10.1002/9780470034071.ch10

Scaling Issues and Design of MEMS

Scaling Issues and Design of MEMS

How to Cite

Baglio, S., Castorina, S. and Savalli, N. (2007) Concluding Remarks, in Scaling Issues and Design of MEMS, John Wiley & Sons, Ltd, Chichester, UK. doi: 10.1002/9780470034071.ch10

Author Information

  1. 1

    University of Catania, Italy

  2. 2

    SYNAPTO, Catania, Italy

Publication History

  1. Published Online: 18 JUL 2008
  2. Published Print: 11 DEC 2007

ISBN Information

Print ISBN: 9780470016992

Online ISBN: 9780470034071

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Keywords:

  • micro- and nano-electromechanical system scaling;
  • semiconductor-based electromechanical systems;
  • semiconductor-based NEMS;
  • nano-electromechanical systems;
  • miniaturized systems to micro- and nanometric devices;
  • scaling and electromechanical systems;
  • miniaturization - in unforeseen applicative fields;
  • basic scaling concepts and concrete applications