Chapter 3. Scaling of Thermal Sensors

  1. Salvatore Baglio1,
  2. Salvatore Castorina2 and
  3. Nicolò Savalli1

Published Online: 18 JUL 2008

DOI: 10.1002/9780470034071.ch3

Scaling Issues and Design of MEMS

Scaling Issues and Design of MEMS

How to Cite

Baglio, S., Castorina, S. and Savalli, N. (2007) Scaling of Thermal Sensors, in Scaling Issues and Design of MEMS, John Wiley & Sons, Ltd, Chichester, UK. doi: 10.1002/9780470034071.ch3

Author Information

  1. 1

    University of Catania, Italy

  2. 2

    SYNAPTO, Catania, Italy

Publication History

  1. Published Online: 18 JUL 2008
  2. Published Print: 11 DEC 2007

ISBN Information

Print ISBN: 9780470016992

Online ISBN: 9780470034071

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Keywords:

  • thermal sensor scaling;
  • semiconductor Seebeck effect;
  • thermoelectric sensors;
  • CMOS CXQ technology - ‘Austria Mikro Systeme’ (AMS);
  • Seebeck coefficient and measured output voltage;
  • thermopiles and thermocouples;
  • dew-point relative humidity sensor;
  • ‘Finite Elements Method’ and designed prototype;
  • relative humidity microsensor and ‘reduced-space occupation’

Summary

This chapter contains sections titled:

  • Thermoelectric Sensors

  • Application: Dew-Point Relative Humidity Sensors

  • Conclusions

  • Acknowledgements

  • References