Chapter 5. Scaling of Mechanical Sensors

  1. Salvatore Baglio1,
  2. Salvatore Castorina2 and
  3. Nicolò Savalli1

Published Online: 18 JUL 2008

DOI: 10.1002/9780470034071.ch5

Scaling Issues and Design of MEMS

Scaling Issues and Design of MEMS

How to Cite

Baglio, S., Castorina, S. and Savalli, N. (2007) Scaling of Mechanical Sensors, in Scaling Issues and Design of MEMS, John Wiley & Sons, Ltd, Chichester, UK. doi: 10.1002/9780470034071.ch5

Author Information

  1. 1

    University of Catania, Italy

  2. 2

    SYNAPTO, Catania, Italy

Publication History

  1. Published Online: 18 JUL 2008
  2. Published Print: 11 DEC 2007

ISBN Information

Print ISBN: 9780470016992

Online ISBN: 9780470034071

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Keywords:

  • mechanical sensor scaling;
  • device modelling and fabrication processes;
  • ‘proof-mass’ and compliant beams;
  • mass displacement versus acceleration;
  • vibrating microgyroscopes;
  • experimental device prototypes;
  • microaccelerometers, mass sensors scaling issues;
  • voltage controlled oscillator (VCO) output

Summary

This chapter contains sections titled:

  • Introduction

  • Device Modelling and Fabrication Processes

  • Experimental Device Prototypes

  • Scaling Issues on Microaccelerometers and Mass Sensors

  • Some Experimental Results

  • Vibrating Microgyroscopes

  • Acknowledgements

  • References