Chapter 7. Technologies and Architectures for Autonomous MEMS Microrobots

  1. Salvatore Baglio1,
  2. Salvatore Castorina2 and
  3. Nicolò Savalli1

Published Online: 18 JUL 2008

DOI: 10.1002/9780470034071.ch7

Scaling Issues and Design of MEMS

Scaling Issues and Design of MEMS

How to Cite

Baglio, S., Castorina, S. and Savalli, N. (2007) Technologies and Architectures for Autonomous MEMS Microrobots, in Scaling Issues and Design of MEMS, John Wiley & Sons, Ltd, Chichester, UK. doi: 10.1002/9780470034071.ch7

Author Information

  1. 1

    University of Catania, Italy

  2. 2

    SYNAPTO, Catania, Italy

Publication History

  1. Published Online: 18 JUL 2008
  2. Published Print: 11 DEC 2007

ISBN Information

Print ISBN: 9780470016992

Online ISBN: 9780470034071

SEARCH

Keywords:

  • MEMS microrobots – technologies and architectures;
  • photothermal microrobot architecture strategy;
  • hypothesized microrobot architecture;
  • microrobot as paradigm;
  • CMOS technology and current-carrying capability;
  • autonomous microrobot microsystem scaling paradigm;
  • ‘Microsurgery’ and microrobotic device;
  • micromachining techniques

Summary

This chapter contains sections titled:

  • Design Issues in Microrobots

  • A Microrobot Architecture Based on Photothermal Strategy

  • A Microrobot as a Paradigm for the Analysis of Scaling in Microsystems

  • References