Chapter 8. Moving Towards the Nanoscale

  1. Salvatore Baglio1,
  2. Salvatore Castorina2 and
  3. Nicolò Savalli1

Published Online: 18 JUL 2008

DOI: 10.1002/9780470034071.ch8

Scaling Issues and Design of MEMS

Scaling Issues and Design of MEMS

How to Cite

Baglio, S., Castorina, S. and Savalli, N. (2007) Moving Towards the Nanoscale, in Scaling Issues and Design of MEMS, John Wiley & Sons, Ltd, Chichester, UK. doi: 10.1002/9780470034071.ch8

Author Information

  1. 1

    University of Catania, Italy

  2. 2

    SYNAPTO, Catania, Italy

Publication History

  1. Published Online: 18 JUL 2008
  2. Published Print: 11 DEC 2007

ISBN Information

Print ISBN: 9780470016992

Online ISBN: 9780470034071

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Keywords:

  • electron-beam lithography;
  • high-resolution scanning electron microscopy (SEM);
  • scanning thermal microscopy (SThM);
  • micromechanical sensor and nanoscale motion detection;
  • nanometre-scale mechanical resonators;
  • moving towards nanoscale;
  • nanodevices and applications;
  • nanodevices and silicon-related nanotechnologies

Summary

This chapter contains sections titled:

  • Semiconductor-Based Nano-Electromechanical Systems

  • Nanofabrication Facilities

  • Overview of Nanosensors

  • Concluding Remarks

  • References