Standard Article

Miniaturized Sensors Employing Micro- and Nanotechnologies


  1. Kenneth J. Loh,
  2. Jerome P. Lynch

Published Online: 15 SEP 2009

DOI: 10.1002/9780470061626.shm081

Encyclopedia of Structural Health Monitoring

Encyclopedia of Structural Health Monitoring

How to Cite

Loh, K. J. and Lynch, J. P. 2009. Miniaturized Sensors Employing Micro- and Nanotechnologies. Encyclopedia of Structural Health Monitoring. .

Author Information

  1. University of Michigan, Department of Civil and Environmental Engineering, Ann Arbor, MI, USA

Publication History

  1. Published Online: 15 SEP 2009


Microelectromechanical systems (MEMSs) represent a revolutionary approach to the miniaturization of sensors designed for structural health monitoring (SHM) applications. The characteristic of MEMS sensors is their size, which can be on the order of a few micrometers in scale. Such sensors also enjoy low fabrication costs, low power demands, and high sensitivity. In this article, the application of MEMS sensors, namely, accelerometers, strain sensors, acoustic emission (AE) sensors, corrosion sensors, and wireless interdigital transducers are described. While MEMS has made major inroads into SHM applications, future miniaturization of sensors will be derived from the nanotechnology domain. Nanotechnology and its associated tools offer engineers an unprecedented opportunity to design sensing materials at atomistic length-scales; the results are multifunctional materials capable of sensing their response to loads.


  • accelerometers;
  • acoustic emission sensors;
  • carbon nanotubes;
  • corrosion sensors;
  • microelectromechanical systems;
  • nanotechnology;
  • strain sensors;
  • wireless sensors