Preparation of ZrO2, Zno, and Zns Thin Films

  1. Donald W. Murphy3 and
  2. Leonard V. Interrante4
  1. Y-M. Gao1,
  2. R. Kershaw1,
  3. A. Wold1 and
  4. D. M. Schleich2

Published Online: 5 JAN 2007

DOI: 10.1002/9780470132616.ch49

Inorganic Syntheses: Nonmolecular Solids, Volume 30

Inorganic Syntheses: Nonmolecular Solids, Volume 30

How to Cite

Gao, Y.-M., Kershaw, R., Wold, A. and Schleich, D. M. (1995) Preparation of ZrO2, Zno, and Zns Thin Films, in Inorganic Syntheses: Nonmolecular Solids, Volume 30 (eds D. W. Murphy and L. V. Interrante), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470132616.ch49

Editor Information

  1. 3

    AT&T Bell Laboratories

  2. 4

    Renselaer Polytechnic Institute

Author Information

  1. 1

    Brown University, Providence, RI 02912.

  2. 2

    ISITEM, Universite de Nantes, La Chantretie, Rue Christian Pauc, CP 3023,44087 Nantes, France.

Publication History

  1. Published Online: 5 JAN 2007
  2. Published Print: 1 JAN 1995

Book Series:

  1. Inorganic Syntheses

ISBN Information

Print ISBN: 9780471305088

Online ISBN: 9780470132616

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Keywords:

  • zirconium oxide (ZnO2);
  • zirconium oxide films;
  • ultrasonic humidifier-horizontal reactor;
  • X-ray diffraction;
  • pyrolysis;
  • zirconium oxide (ZnO2);
  • zirconium oxide films;
  • ultrasonic humidifier-horizontal reactor;
  • X-ray diffraction;
  • pyrolysis

Summary

This chapter contains sections titled:

  • Growth and Charaterization of ZrO2 Films

  • Growth of Zno Films

  • Growth of Zns Films by Conversion of ZnO Films with H2S