14. Phase Shifting Interferometry

  1. Daniel Malacara
  1. Horst Schreiber and
  2. John H. Bruning

Published Online: 2 NOV 2006

DOI: 10.1002/9780470135976.ch14

Optical Shop Testing, Third Edition

Optical Shop Testing, Third Edition

How to Cite

Schreiber, H. and Bruning, J. H. (2007) Phase Shifting Interferometry, in Optical Shop Testing, Third Edition (ed D. Malacara), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470135976.ch14

Editor Information

  1. Centro de Investigaciones en Optica, A. C., Loma del Bosque # 115 Col. Lomas del Campestre, P.O. Box 1-948, Postal Code 7 150, León, Gto., México

Author Information

  1. GCATropel Div., 60 O'Connor Road, Fairport, NY 14450, USA

Publication History

  1. Published Online: 2 NOV 2006
  2. Published Print: 8 JUN 2007

ISBN Information

Print ISBN: 9780471484042

Online ISBN: 9780470135976

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Keywords:

  • phase shifting interferometry (PSI);
  • PSI algorithms;
  • aspheres and extended range PSI techniques

Summary

This chapter contains sections titled:

  • Introduction

  • Fundamental Concepts

  • Advantages of PSI

  • Methods of Phase Shifting

  • Detecting the Wavefront Phase

  • Data Collection

  • PSI Algorithms

  • Phase Shift Calibration

  • Error Sources

  • Detectors and Spatial Sampling

  • Quality Functions

  • Phase Unwrapping

  • Aspheres and Extended Range PSI Techniques

  • Other Analysis Methods

  • Computer Processing and Output

  • Implementation and Applications

  • Future Trends for PSI