15. Surface Profilers, Multiple Wavelength, and White Light Intereferometry

  1. Daniel Malacara
  1. J. Schmit1,
  2. K. Creath2 and
  3. J. C. Wyant3

Published Online: 2 NOV 2006

DOI: 10.1002/9780470135976.ch15

Optical Shop Testing, Third Edition

Optical Shop Testing, Third Edition

How to Cite

Schmit, J., Creath, K. and Wyant, J. C. (2007) Surface Profilers, Multiple Wavelength, and White Light Intereferometry, in Optical Shop Testing, Third Edition (ed D. Malacara), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470135976.ch15

Editor Information

  1. Centro de Investigaciones en Optica, A. C., Loma del Bosque # 115 Col. Lomas del Campestre, P.O. Box 1-948, Postal Code 7 150, León, Gto., México

Author Information

  1. 1

    Veeco Instruments Inc., 2650 E. Elvira Rd., Tucson, AZ 85706, USA

  2. 2

    Optineering Tucson Arizona, USA

  3. 3

    College of Optical Sciences, The University of Arizona, 1630 East University Boulevard, Tucson, AZ 85721-0094, USA

Publication History

  1. Published Online: 2 NOV 2006
  2. Published Print: 8 JUN 2007

ISBN Information

Print ISBN: 9780471484042

Online ISBN: 9780470135976

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Keywords:

  • surface profilers;
  • two wavelength and multiple wavelength techniques;
  • optical ranging methods

Summary

This chapter contains sections titled:

  • Introduction to Surface Profilers

  • Contact Profilometers

  • Optical Profilers

  • Interferometric Optical Profilers

  • Two Wavelength and Multiple Wavelength Techniques

  • White Light Interference Optical Profilers

  • Wavelength Scanning Interferometer

  • Spectrally Resolved White Light Interferometry (SRWLI)

  • Polarization Interferometers

  • Optical Ranging Methods

  • Summary