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Frontmatter

  1. Yuzhuo Li

Published Online: 23 MAR 2007

DOI: 10.1002/9780470180907.fmatter

Microelectronic Applications of Chemical Mechanical Planarization

Microelectronic Applications of Chemical Mechanical Planarization

How to Cite

Li, Y. (ed) (2007) Frontmatter, in Microelectronic Applications of Chemical Mechanical Planarization, John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470180907.fmatter

Editor Information

  1. Center for Advanced Materials Processing, Department of Chemistry, Clarkson University, 8 Clarkson Avenue, Potsdam, NY 13699, USA

Publication History

  1. Published Online: 23 MAR 2007
  2. Published Print: 5 OCT 2007

ISBN Information

Print ISBN: 9780471719199

Online ISBN: 9780470180907

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Summary

The prelims comprise:

  • Half Title

  • Title

  • Copyright

  • Contents

  • Foreword

  • Contributing Authors