3. Solid–Vapor Reactions

  1. John N. Lalena1,
  2. David A. Cleary2,
  3. Everett E. Carpenter3 and
  4. Nancy F. Dean4

Published Online: 30 APR 2007

DOI: 10.1002/9780470191576.ch3

Inorganic Materials Synthesis and Fabrication

Inorganic Materials Synthesis and Fabrication

How to Cite

Lalena, J. N., Cleary, D. A., Carpenter, E. E. and Dean, N. F. (2008) Solid–Vapor Reactions, in Inorganic Materials Synthesis and Fabrication, John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470191576.ch3

Author Information

  1. 1

    University of Maryland, University College-Europe, USA

  2. 2

    Gonzaga University, USA

  3. 3

    Virginia Commonwealth University, USA

  4. 4

    Formerly, Honeywell Electronic Materials, USA

Publication History

  1. Published Online: 30 APR 2007
  2. Published Print: 18 JAN 2008

ISBN Information

Print ISBN: 9780471740049

Online ISBN: 9780470191576

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Keywords:

  • physical vapor deposition, chemical vapor deposition, and molecular beam epitaxy;
  • vapor-phase species;
  • gas-phase molecules

Summary

This chapter contains sections titled:

  • Vapor-Phase Fundamentals

  • Vapor Absorption and Adsorption

  • Film Formation Basics

  • Vapor-Phase Intercalation

  • Physical Vapor Deposition

  • Chemical Vapor Deposition

  • Molecular Beam Epitaxy

  • References