18. Parameter Design of Fine-Line Patterning for IC Fabrication

  1. Dr. Genichi Taguchi engineering Executive Director Honorary Member,
  2. Dr. Subir Chowdhury aerospace engineering, industrial management chairman CEO world leader strategist author honorary member honorary doctorate and
  3. Yuin Wu B.S. in chemical engineering professor Executive Director consultant

Published Online: 26 NOV 2007

DOI: 10.1002/9780470258354.cs18

Taguchi's Quality Engineering Handbook

Taguchi's Quality Engineering Handbook

How to Cite

Taguchi, G., Chowdhury, S. and Wu, Y. (2004) Parameter Design of Fine-Line Patterning for IC Fabrication, in Taguchi's Quality Engineering Handbook, John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470258354.cs18

Author Information

  1. American Supplier Institute (ASI), USA

Publication History

  1. Published Online: 26 NOV 2007
  2. Published Print: 22 OCT 2004

ISBN Information

Print ISBN: 9780471413349

Online ISBN: 9780470258354

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Keywords:

  • integrated circuits and printed circuit board;
  • photoresist;
  • patternability

Summary

This chapter contains sections titled:

  • Introduction

  • Evaluation Characteristics and Experiment

  • Optimal Configuration

  • Sensitivity Analysis

  • Reference