18. Fabrication of Microstructured Ceramics by Electrophoretic Deposition of Optimized Suspensions

  1. Edgar Lara-Curzio and
  2. Michael J. Readey
  1. H. Von Both1,
  2. M. Dauscher2 and
  3. J. Haußelt2

Published Online: 26 MAR 2008

DOI: 10.1002/9780470291184.ch18

28th International Conference on Advanced Ceramics and Composites A: Ceramic Engineering and Science Proceedings, Volume 25, Issue 3

28th International Conference on Advanced Ceramics and Composites A: Ceramic Engineering and Science Proceedings, Volume 25, Issue 3

How to Cite

Von Both, H., Dauscher, M. and Haußelt, J. (2004) Fabrication of Microstructured Ceramics by Electrophoretic Deposition of Optimized Suspensions, in 28th International Conference on Advanced Ceramics and Composites A: Ceramic Engineering and Science Proceedings, Volume 25, Issue 3 (eds E. Lara-Curzio and M. J. Readey), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470291184.ch18

Author Information

  1. 1

    Institute of Microsystem Technology / Materials Process Technology, University of Freiburg Georges-Kühler-Allee 102 D-79110 Freiburg, Germany

  2. 2

    Institute of Materials Research III, Forschungszentrum Karlruhe Hermann-von-Helmholtz-Platz 1 D-76344 Eggenstein-Leopoldshafen, Germany and Institute of Microsystem Technology / Materials Process Technology, University of Freiburg Georges-Köhler-Allee 102 D-79110 Freiburg, Germany

Publication History

  1. Published Online: 26 MAR 2008
  2. Published Print: 1 JAN 2004

ISBN Information

Print ISBN: 9780470051498

Online ISBN: 9780470291184

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Keywords:

  • EPD;
  • sintering shrinkage;
  • chemical engineering technology.;
  • organic, electrosterically stabilized suspension;
  • homogenization;
  • nanosized and multimodal particle

Summary

Ceramics with microstructured surfaces open new possibilities in applied microsystem and micro chemical engineering technology 1. For excellent surface roughness and dimensional accuracy the use of submicron and nanosized ceramics is necessary. the processing of such powders by conventional processing techniques like micro injection moulding, slip casting or axial pressing is difficult. However, dispersing, deagglomeration, and stabilization of such particles in alcohol results in suspensions which can be used for electrophoretic deposition (EPD) 2–5. EPD produces homogeneous green bodies with high particle packing density, low surface roughness and high mechanical strength 5. in case of fabrication of microstructures, the deposition electrodes simultaneously serve as so-called “lost” substrates. the thermal removal of the substrates is followed by sintering the green parts to full density 6. the present paper focuses on the fabrication of microstructured alumina ceramics by electrophoretic deposition of optimized suspensions. Emphasis is put on the increase of particle packing densities of the green bodies and therefore on the minimization of sintering shrinkage for high dimensional accuracy. Relating to particle packing theory 7–8, the packing density is directly influenced by the particle size distribution of the starting powders. A precise knowledge of the influence of particle size distribution on packing densities allows the fabrication of microstructured ceramic green bodies by EPD with high green densities. Therefore, optimized suspension and deposition conditions of the sintered ceramic microstructured components show low surface roughness and high dimensional accuracy.