5. Direct Evaluation of Local Thermal Conduction in Silicon Nitrides with Enhanced Grain Growth

  1. Edgar Lara-Curzio and
  2. Michael J. Readey
  1. Akira Okada1,
  2. Toshio Hori1,
  3. Takeo Okamura2,
  4. Yasuyuki Niino2 and
  5. Jiping Ye2

Published Online: 26 MAR 2008

DOI: 10.1002/9780470291191.ch5

28th International Conference on Advanced Ceramics and Composites B: Ceramic Engineering and Science Proceedings, Volume 25, Issue 4

28th International Conference on Advanced Ceramics and Composites B: Ceramic Engineering and Science Proceedings, Volume 25, Issue 4

How to Cite

Okada, A., Hori, T., Okamura, T., Niino, Y. and Ye, J. (2004) Direct Evaluation of Local Thermal Conduction in Silicon Nitrides with Enhanced Grain Growth, in 28th International Conference on Advanced Ceramics and Composites B: Ceramic Engineering and Science Proceedings, Volume 25, Issue 4 (eds E. Lara-Curzio and M. J. Readey), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470291191.ch5

Author Information

  1. 1

    Nissan Motor Co., Ltd. 1, Natsushima-cho, Yokosuka 237-8523, Japan

  2. 2

    Nissan Arc, Ltd., 1, Natsushima-cho, Yokosuka 237-0061, Japan

Publication History

  1. Published Online: 26 MAR 2008
  2. Published Print: 1 JAN 2004

ISBN Information

Print ISBN: 9780470051528

Online ISBN: 9780470291191

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Keywords:

  • micro-thermal analyzer;
  • scanning probe microscopy;
  • thermal conductivity;
  • silicon nitride;
  • thermal images

Summary

A micro-thermal analyzer, used for scanning probe microscopy, was applied to visualize the thermal conductance distribution in silicon nitrides. In the scanning thermal microscopy mode, it was confirmed that thermal conductivity is low at grain boundaries and high in the silicon nitride grains. Localized thermal analysis revealed that the thermal response from grains larger than approximately 5 μm gives valid information, independent of the individual grains. The response from smaller grains, however, exhibits grain size dependence. It is thought that the thermal response from small grains is influenced by the presence of grain boundaries near the probe.