61. Chemical Etching of Silicon Carbide Ceramic Surface in Chlorine-Containing Gas Mixtures

  1. Edgar Lara-Curzio and
  2. Michael J. Readey
  1. A. V. Zinovev,
  2. J. F. Moore,
  3. J. Hryn,
  4. O. Auciello,
  5. J. Carlisle and
  6. M. J. Pellin

Published Online: 26 MAR 2008

DOI: 10.1002/9780470291191.ch61

28th International Conference on Advanced Ceramics and Composites B: Ceramic Engineering and Science Proceedings, Volume 25, Issue 4

28th International Conference on Advanced Ceramics and Composites B: Ceramic Engineering and Science Proceedings, Volume 25, Issue 4

How to Cite

Zinovev, A. V., Moore, J. F., Hryn, J., Auciello, O., Carlisle, J. and Pellin, M. J. (2004) Chemical Etching of Silicon Carbide Ceramic Surface in Chlorine-Containing Gas Mixtures, in 28th International Conference on Advanced Ceramics and Composites B: Ceramic Engineering and Science Proceedings, Volume 25, Issue 4 (eds E. Lara-Curzio and M. J. Readey), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470291191.ch61

Author Information

  1. Argonne National Laboratory, Material Science Division 9700, S. Cass. Ave, Argonne, Illinois, 60439.

Publication History

  1. Published Online: 26 MAR 2008
  2. Published Print: 1 JAN 2004

ISBN Information

Print ISBN: 9780470051528

Online ISBN: 9780470291191

SEARCH

Options for accessing this content:

  • If you are a society or association member and require assistance with obtaining online access instructions please contact our Journal Customer Services team.
    http://wiley.force.com/Interface/ContactJournalCustomerServices_V2.
  • Login via other institutional login options http://onlinelibrary.wiley.com/login-options.
  • You can purchase online access to this Chapter for a 24-hour period (price varies by title)
    • If you already have a Wiley Online Library or Wiley InterScience user account: login above and proceed to purchase the article.
    • New Users: Please register, then proceed to purchase the article.

Login via OpenAthens

or

Search for your institution's name below to login via Shibboleth.

Please register to:

  • Save publications, articles and searches
  • Get email alerts
  • Get all the benefits mentioned below!

Register now >