15. A Novel Test Method for Measuring Mechanical Properties at the Small-Scale: The Theta Specimen

  1. Edgar Lara-Curzio
  1. George David Quinn1,
  2. Edwin Fuller1,
  3. Dan Xiang1,
  4. Ajit Jillavenkatesa1,
  5. Li Ma1,
  6. Douglas Smith1 and
  7. James Beall2

Published Online: 26 MAR 2008

DOI: 10.1002/9780470291221.ch15

Mechanical Properties and Performance of Engineering Ceramics and Composites: Ceramic Engineering and Science Proceedings, Volume 26, Number 2

Mechanical Properties and Performance of Engineering Ceramics and Composites: Ceramic Engineering and Science Proceedings, Volume 26, Number 2

How to Cite

Quinn, G. D., Fuller, E., Xiang, D., Jillavenkatesa, A., Ma, L., Smith, D. and Beall, J. (2008) A Novel Test Method for Measuring Mechanical Properties at the Small-Scale: The Theta Specimen, in Mechanical Properties and Performance of Engineering Ceramics and Composites: Ceramic Engineering and Science Proceedings, Volume 26, Number 2 (ed E. Lara-Curzio), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470291221.ch15

Author Information

  1. 1

    National Institute of Standards and Technology 100 Bureau Drive Gaithersburg, MD, 20899-8529

  2. 2

    National Institute of Standards and Technology 325 Broadway Road Boulder, CO, 80305-3328

Publication History

  1. Published Online: 26 MAR 2008
  2. Published Print: 1 JAN 2005

ISBN Information

Print ISBN: 9781574982329

Online ISBN: 9780470291221

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Keywords:

  • deep reactive ion etching;
  • nano-electromechanical systems;
  • microflash photography;
  • united states air force;
  • microscope slides

Summary

A test method has been developed for measuring mechanical properties of material structures at the small-scale. Round or hexagonal rings are compressed vertically on their ends thereby creating a uniform tension stress in a horizontal crossbar that serves as the gauge section. The compression loading scheme is simple and eliminates the need for special grips. A conventional nanoindentation hardness machine serves as a small-scale universal testing machine that applies load and monitors displacement. Prototype miniature silicon specimens were fabricated by deep reactive ion etching (DRIE) of a single crystal wafer and were tested to fracture. Finite element analysis confirmed that the stress distribution was very uniform in the web portion of the specimen. The theta specimen is a versatile configuration and has great potential for use with a variety of materials and for testing extremely small structures.