20. Characteristics of Sealed Parts Under Internal Pressure in Super High Pressure Mercury Discharge Lamps

  1. Edgar Lara-Curzio
  1. Masahiko Kase1,
  2. Toshiyuki Sawa2 and
  3. Yuichiro Iwama3

Published Online: 26 MAR 2008

DOI: 10.1002/9780470291221.ch20

Mechanical Properties and Performance of Engineering Ceramics and Composites: Ceramic Engineering and Science Proceedings, Volume 26, Number 2

Mechanical Properties and Performance of Engineering Ceramics and Composites: Ceramic Engineering and Science Proceedings, Volume 26, Number 2

How to Cite

Kase, M., Sawa, T. and Iwama, Y. (2005) Characteristics of Sealed Parts Under Internal Pressure in Super High Pressure Mercury Discharge Lamps, in Mechanical Properties and Performance of Engineering Ceramics and Composites: Ceramic Engineering and Science Proceedings, Volume 26, Number 2 (ed E. Lara-Curzio), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470291221.ch20

Author Information

  1. 1

    ORC Manufacturing CO., LTD. Tamagawa 4896, Chino-Shi Nagano, Japan. Zip-Code: 391-0011

  2. 2

    Department of Mechanical Engineering Hiroshima University Kagamiyama 1-4-1, Higashi Hiroshima-Shi Hiroshima, Japan. Zip-Code: 739-8527

  3. 3

    ORC Manufacturing Co., LTD. Tamagawa 4896, Chino-Shi Nagano, Japan. Zip-Code: 391-0011

Publication History

  1. Published Online: 26 MAR 2008
  2. Published Print: 1 JAN 2005

ISBN Information

Print ISBN: 9781574982329

Online ISBN: 9780470291221

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Keywords:

  • finite-element method;
  • mercury discharge lamps;
  • electrodes;
  • molybdenum;
  • tantalum

Summary

Super high pressure mercury discharge lamps have been used as a UV light source in photolithography exposure processes such as patterning LCDs, PCBs and semiconductors. It is well known that burst of the lamps during operation is a major problem. Rupture initiation has been found empirically in the sealed parts of lamps and an internal pressure is assumed as a dominant factor for the rupture in the sealed parts. Thus, the characteristics of rupture and improvement methods for the sealed parts under internal pressure have been investigated. Static water pressure tests were carried out in order to investigate the rupture pressure of the sealed parts. In addition, photoelasticity was employed to observe the stress distribution of the sealed parts. Finite-element method (FEM) calculations were done to obtain the maximum principal stress s̀1 distribution of the sealed parts under internal pressure. From the results, it was found that the rupture pressure of sealed parts was increased as debonded length between the foils and quartz was decreased. In addition, it was observed that the rupture of the sealed parts occurred at about 4 MPa internal pressure and a stress concentration exists near the end of molybdenum foil and quartz glass. The trends of the numerical results were in good agreement with that of the experimental ones.