3. Metal-Oxide Based Toxic Gas Sensors
- Sheng Yao,
- Bruce Tuttle,
- Clive Randall and
- Dwight Viehland
Published Online: 26 MAR 2008
Copyright © 2005 The American Ceramic Society
Advances in Electronic Ceramic Materials: Ceramic Engineering and Science Proceedings, Volume 26, Number 5
How to Cite
Lee, D. D. and Choi, N. J. (2005) Metal-Oxide Based Toxic Gas Sensors, in Advances in Electronic Ceramic Materials: Ceramic Engineering and Science Proceedings, Volume 26, Number 5 (eds S. Yao, B. Tuttle, C. Randall and D. Viehland), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470291252.ch3
- Published Online: 26 MAR 2008
- Published Print: 1 JAN 2005
Print ISBN: 9781574982350
Online ISBN: 9780470291252
- MEM- technology;
Recently, there has been increasing demand for monitoring the highly toxic gases known as chemical warfare agents such as nerve, vesicant, blood, choking agents. For this purpose, metal oxide semiconductor gas sensors have been investigated and shown very promising results.
In this study, thick film SnO2-based gas sensors added with Al2O3, In2O3, ZnO, and ZrO2 using alumina substrate were fabricated, and their material properties and sensing properties for the four different simulant chemical warfare agents of dimethyl methyl phosphonate, dipropylene glycol methyl ether, acetonitrile, dichloromethane have been examined. A micro sensor array with 6 devices using silicon substrate was designed and fabricated using MEMS technology to realize high sensitive and high selective sensing system with low power consumption and provide the portable chemical agents detecting system.
The thick film sensing devices exhibited quite high sensitivity to the toxic gases at ppm level. And the micro sensor using MEMS technology showed high sensitivity at the device temperature of 300°C which could be obtained by only 90 mW heater power consumption.