Chapter 53. Strength and Weibull Characterization of Polysilicon Membranes for Mems Applications

  1. Rajan Tandon,
  2. Andrew Wereszczak and
  3. Edgar Lara-Curzio
  1. Osama Jadaan1,
  2. Joseph Palko2,
  3. Noel Nerneth3,
  4. Anna Dubnisheva4,
  5. Shuvo Roy4 and
  6. Aaron Fleischman4

Published Online: 27 MAR 2008

DOI: 10.1002/9780470291313.ch53

Mechanical Properties and Performance of Engineering Ceramics II: Ceramic Engineering and Science Proceedings, Volume 27, Issue 2

Mechanical Properties and Performance of Engineering Ceramics II: Ceramic Engineering and Science Proceedings, Volume 27, Issue 2

How to Cite

Jadaan, O., Palko, J., Nerneth, N., Dubnisheva, A., Roy, S. and Fleischman, A. (2006) Strength and Weibull Characterization of Polysilicon Membranes for Mems Applications, in Mechanical Properties and Performance of Engineering Ceramics II: Ceramic Engineering and Science Proceedings, Volume 27, Issue 2 (eds R. Tandon, A. Wereszczak and E. Lara-Curzio), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470291313.ch53

Author Information

  1. 1

    University of Wisconsin–Platteville College of Engineering, Mathematics, and Science Platteville, WI, 53818

  2. 2

    Connecticut Reserve Technologies, Inc. Strongsville, OH, 44136

  3. 3

    NASA Glenn Research Center Cleveland, OH, 44135

  4. 4

    The Cleveland Clinic Foundation Cleveland, OH 44195

Publication History

  1. Published Online: 27 MAR 2008
  2. Published Print: 1 JAN 2006

ISBN Information

Print ISBN: 9780470080528

Online ISBN: 9780470291313

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