Chapter 28. Indentation Damage of Silicon Carbide Deposited on Different Substrates

  1. Mrityunjay Singh and
  2. Todd Jessen
  1. Ji Yeon Park1,
  2. Weon-Ju Kim1,
  3. Min Young Lee1,
  4. Joung H Kim2 and
  5. Gye Won Hong1

Published Online: 26 MAR 2008

DOI: 10.1002/9780470294680.ch28

25th Annual Conference on Composites, Advanced Ceramics, Materials, and Structures: A: Ceramic Engineering and Science Proceedings, Volume 22, Issue 3

25th Annual Conference on Composites, Advanced Ceramics, Materials, and Structures: A: Ceramic Engineering and Science Proceedings, Volume 22, Issue 3

How to Cite

Park, J. Y., Kim, W.-J., Lee, M. Y., Kim, J. H. and Hong, G. W. (2001) Indentation Damage of Silicon Carbide Deposited on Different Substrates, in 25th Annual Conference on Composites, Advanced Ceramics, Materials, and Structures: A: Ceramic Engineering and Science Proceedings, Volume 22, Issue 3 (eds M. Singh and T. Jessen), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470294680.ch28

Author Information

  1. 1

    Functional Materials, Korea Atomic Energy Research Institute, Taejon 305–353, Korea

  2. 2

    Dept of Ceramic Eng., Yonsei University, Seoul, Korea

Publication History

  1. Published Online: 26 MAR 2008
  2. Published Print: 1 JAN 2001

ISBN Information

Print ISBN: 9780470375730

Online ISBN: 9780470294680

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Keywords:

  • monolithic;
  • graphite;
  • parameters;
  • microstructure;
  • graphite

Summary

Indentation-induced damage in silicon carbide (SiC) deposited on hard or soft substrates is investigated and the effects of characteristics of the substrates on damages of the deposited layers are compared. The SiC layers with various coating thicknesses (50 m̈m-150m̈m) were deposited by the LPCVD (Low Pressure Chemical Vapor Deposition) method. Graphite was used as a soft substrate and monolithic CVD-SiC and reaction sintered (RS)-SiC were used as hard ones. Indentation damages with different sizes were introduced by Vickers indentation and Hertzian indentation test. While the stress-strain curve of a specimen using a hard substrate shows relatively elastic behavior at the small indentation strain irrespective of the coating thickness, that of a soft substrate initially follows close to that of coating layer monolith and finally approaches the indentation stress-strain curve of the substrate material. The hardness of SiC coated graphite has discrepancy with a decreasing tendency. The applied load for hardness degradation shifts to higher one as the coating thickness increases.