Chapter 83. Preparation and Properties of Ysz Electrolyte Thin Films Via Liquid Fuel Combustion Chemical Vapor Deposition

  1. Hua-Tay Lin and
  2. Mrityunjay Singh
  1. Zhigang Xu,
  2. Q. Wei and
  3. Jag Sankar

Published Online: 26 MAR 2008

DOI: 10.1002/9780470294741.ch83

26th Annual Conference on Composites, Advanced Ceramics, Materials, and Structures: A: Ceramic Engineering and Science Proceedings, Volume 23, Issue 3

26th Annual Conference on Composites, Advanced Ceramics, Materials, and Structures: A: Ceramic Engineering and Science Proceedings, Volume 23, Issue 3

How to Cite

Xu, Z., Wei, Q. and Sankar, J. (2002) Preparation and Properties of Ysz Electrolyte Thin Films Via Liquid Fuel Combustion Chemical Vapor Deposition, in 26th Annual Conference on Composites, Advanced Ceramics, Materials, and Structures: A: Ceramic Engineering and Science Proceedings, Volume 23, Issue 3 (eds H.-T. Lin and M. Singh), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470294741.ch83

Author Information

  1. NSF Center For Advanced Materials And Smart Structures North Carolina A&T State University 1601 Market Street Greensboro, NC 27411

Publication History

  1. Published Online: 26 MAR 2008
  2. Published Print: 1 JAN 2002

ISBN Information

Print ISBN: 9780470375785

Online ISBN: 9780470294741

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Keywords:

  • metal-organic;
  • heating/cooling;
  • air-cooling nozzle;
  • crystallinity

Summary

An innovative atmospheric combustion chemical vapor deposition (ACCVD) system for thin films has been developed. Thin films of yttria stabilized zirconia (YSZ) had been processed successfully on this system. The parameters such as the ratio of oxygen to liquid fuel in flame, the concentration of metal reagents in the solution, the temperature of the substrate, substrate material and heat-treatment played important roles in the film processing. They had been systematically investigated. The as-grown films were characterized with x-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive spectroscopy (EDS) and transmission electron microscopy (TEM). Within the range of experimental parameters, the phase of the film was predominately in fluorite cubic structure. It was shown that the phase and crystallinity of the films were strongly dependent upon the experimental variable.