Chapter 83. Preparation and Properties of Ysz Electrolyte Thin Films Via Liquid Fuel Combustion Chemical Vapor Deposition
- Hua-Tay Lin,
- Mrityunjay Singh
Published Online: 26 MAR 2008
DOI: 10.1002/9780470294741.ch83
Copyright © 2002 The American Ceramic Society
Book Title
26th Annual Conference on Composites, Advanced Ceramics, Materials, and Structures: A: Ceramic Engineering and Science Proceedings, Volume 23, Issue 3
Additional Information
How to Cite
Xu, Z., Wei, Q. and Sankar, J. (2008) Preparation and Properties of Ysz Electrolyte Thin Films Via Liquid Fuel Combustion Chemical Vapor Deposition, in 26th Annual Conference on Composites, Advanced Ceramics, Materials, and Structures: A: Ceramic Engineering and Science Proceedings, Volume 23, Issue 3 (eds H.-T. Lin and M. Singh), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470294741.ch83
Publication History
- Published Online: 26 MAR 2008
- Published Print: 1 JAN 2002
Book Series:
ISBN Information
Print ISBN: 9780470375785
Online ISBN: 9780470294741
- Summary
- Chapter
- References
Keywords:
- metal-organic;
- heating/cooling;
- air-cooling nozzle;
- crystallinity
Summary
An innovative atmospheric combustion chemical vapor deposition (ACCVD) system for thin films has been developed. Thin films of yttria stabilized zirconia (YSZ) had been processed successfully on this system. The parameters such as the ratio of oxygen to liquid fuel in flame, the concentration of metal reagents in the solution, the temperature of the substrate, substrate material and heat-treatment played important roles in the film processing. They had been systematically investigated. The as-grown films were characterized with x-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive spectroscopy (EDS) and transmission electron microscopy (TEM). Within the range of experimental parameters, the phase of the film was predominately in fluorite cubic structure. It was shown that the phase and crystallinity of the films were strongly dependent upon the experimental variable.