Chapter 11. The Electrical Properties of CaZrO3 Humidity Sensor

  1. Hau-Tay Lin and
  2. Mrityunjay Singh
  1. Jae-Ho Yuk1,
  2. Byung-Soo Lee2,
  3. Do-Hyun You3 and
  4. Hyeong-Gweon Kim4

Published Online: 26 MAR 2008

DOI: 10.1002/9780470294758.ch11

26th Annual Conference on Composites, Advanced Ceramics, Materials, and Structures: B: Ceramic Engineering and Science Proceedings, Volume 23, Issue 4

26th Annual Conference on Composites, Advanced Ceramics, Materials, and Structures: B: Ceramic Engineering and Science Proceedings, Volume 23, Issue 4

How to Cite

Yuk, J.-H., Lee, B.-S., You, D.-H. and Kim, H.-G. (2002) The Electrical Properties of CaZrO3 Humidity Sensor, in 26th Annual Conference on Composites, Advanced Ceramics, Materials, and Structures: B: Ceramic Engineering and Science Proceedings, Volume 23, Issue 4 (eds H.-T. Lin and M. Singh), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470294758.ch11

Author Information

  1. 1

    Dept. of Electrical Eng., Yuhan College 185–34, Gwean-dong, Sosa-gu, Bucheon Gyounggi-do, S. Korea, 422–749

  2. 2

    Dept. of Electrical Eng., Inha University 253, Yonghyun-dong, Nam-gu Inchon, S. Korea, 402–751

  3. 3

    Dept. of Electrical Eng., Ansan College of Tech. 170, Choji-dong, Ansan, Gyounggi-do S. Korea, 425–792

  4. 4

    BES Co. 208–51, Byeokje-dong, Deogyang-gu, Goyang Gyonggi-do, S. Korea, 412–51

Publication History

  1. Published Online: 26 MAR 2008
  2. Published Print: 1 JAN 2002

ISBN Information

Print ISBN: 9780470375792

Online ISBN: 9780470294758

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Keywords:

  • humidity sensor;
  • electrical properties;
  • solid-state oxide synthesis;
  • hysteresis;
  • humidity adsorption

Summary

Humidity sensitive devices of CaZrO3 were prepared using solid-state oxide synthesis route and their electrical properties have been investigated. The impedance of this sensor decreases with increasing relative humidity and the humidity sensitivity is higher at the lower frequencies with good temperature stability. Hysteresis is negligible under cyclic humidity changes. The electrical conduction with water adsorption is dominated by the ions, and activation energy decreases with increasing relative humidity.