Chapter 3. Laser CVD System Design, Operation, and Modeling

  1. Hau-Tay Lin and
  2. Mrityunjay Singh
  1. W. Jack Lackey,
  2. David Rosen,
  3. Chad Duty,
  4. Daniel Jean,
  5. Scott Bondi,
  6. Tarek Elkhatib,
  7. Ryan Johnson,
  8. Mingxuan Jiang,
  9. Jian Mi,
  10. Josh Gillespie and
  11. Racheal Harvey

Published Online: 26 MAR 2008

DOI: 10.1002/9780470294758.ch3

26th Annual Conference on Composites, Advanced Ceramics, Materials, and Structures: B: Ceramic Engineering and Science Proceedings, Volume 23, Issue 4

26th Annual Conference on Composites, Advanced Ceramics, Materials, and Structures: B: Ceramic Engineering and Science Proceedings, Volume 23, Issue 4

How to Cite

Lackey, W. J., Rosen, D., Duty, C., Jean, D., Bondi, S., Elkhatib, T., Johnson, R., Jiang, M., Mi, J., Gillespie, J. and Harvey, R. (2002) Laser CVD System Design, Operation, and Modeling, in 26th Annual Conference on Composites, Advanced Ceramics, Materials, and Structures: B: Ceramic Engineering and Science Proceedings, Volume 23, Issue 4 (eds H.-T. Lin and M. Singh), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470294758.ch3

Author Information

  1. Georgia Institute of Technology George W. Woodruff School of Mechanical Engineering MARC Building, Room 458 813 Ferst Drive, NW Atlanta, Georgia 30332–0405

Publication History

  1. Published Online: 26 MAR 2008
  2. Published Print: 1 JAN 2002

ISBN Information

Print ISBN: 9780470375792

Online ISBN: 9780470294758

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