Chapter 3. Laser CVD System Design, Operation, and Modeling
- Hau-Tay Lin and
- Mrityunjay Singh
Published Online: 26 MAR 2008
Copyright © 2002 The American Ceramic Society
26th Annual Conference on Composites, Advanced Ceramics, Materials, and Structures: B: Ceramic Engineering and Science Proceedings, Volume 23, Issue 4
How to Cite
Lackey, W. J., Rosen, D., Duty, C., Jean, D., Bondi, S., Elkhatib, T., Johnson, R., Jiang, M., Mi, J., Gillespie, J. and Harvey, R. (2002) Laser CVD System Design, Operation, and Modeling, in 26th Annual Conference on Composites, Advanced Ceramics, Materials, and Structures: B: Ceramic Engineering and Science Proceedings, Volume 23, Issue 4 (eds H.-T. Lin and M. Singh), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470294758.ch3
- Published Online: 26 MAR 2008
- Published Print: 1 JAN 2002
Print ISBN: 9780470375792
Online ISBN: 9780470294758
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