Chapter 13. Precision Microgear Fabrication and Sintering with Microwaves

  1. Waltraud M. Kriven and
  2. Hua-Tay Lin
  1. Shawn M. Allan1,
  2. Holly S. Shulman2,
  3. Carlos C. Chang3 and
  4. Alfredo M. Morales4

Published Online: 27 MAR 2008

DOI: 10.1002/9780470294802.ch13

27th Annual Cocoa Beach Conference on Advanced Ceramics and Composites: A: Ceramic Engineering and Science Proceedings, Volume 24, Issue 3

27th Annual Cocoa Beach Conference on Advanced Ceramics and Composites: A: Ceramic Engineering and Science Proceedings, Volume 24, Issue 3

How to Cite

Allan, S. M., Shulman, H. S., Chang, C. C. and Morales, A. M. (2003) Precision Microgear Fabrication and Sintering with Microwaves, in 27th Annual Cocoa Beach Conference on Advanced Ceramics and Composites: A: Ceramic Engineering and Science Proceedings, Volume 24, Issue 3 (eds W. M. Kriven and H.-T. Lin), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470294802.ch13

Author Information

  1. 1

    Alfred University 1046 PCC Alfred, NY 14802

  2. 2

    Ceralink, Inc. 200 N. Main St. Alfred, NY 14802

  3. 3

    Alfred University 2 Pine Street Alfred, NY 14802

  4. 4

    Sandia National Laboratories 7011 East Ave, MS 9401 Livermore, CA 94551

Publication History

  1. Published Online: 27 MAR 2008
  2. Published Print: 1 JAN 2003

ISBN Information

Print ISBN: 9780470375839

Online ISBN: 9780470294802

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Keywords:

  • microsystems;
  • poly methylmethacrylate;
  • research microwave systems;
  • ceramics;
  • epoxy-cast microparts

Summary

Great strides are being made in the U.S. in the design and fabrication of microsystems. Micro-electro-mechanical-systems (MEMS) require high precision microcomponents. A novel technique for fabricating precision ceramic microgears and other devices is under investigation at Sandia National Laboratories. This involves making a precision mold and epoxy-casting with ceramic powders. Alumina and zirconia toughened alumina microgears were fabricated and microwave sintered. The gears were held flat between zirconia discs and microwave sintered to temperatures between 1300 and 1550 °C in less than 1 hour. Microstructure and the uniformity of shrinkage were observed by SEM and compared to conventionally fired gears.