Chapter 83. Microstructureand Properties of W-Cr-N Composite Films Produced Byubm Sputtering Method
- Waltraud M. Kriven and
- Hua-Tay Lin
Published Online: 27 MAR 2008
Copyright © 2003 The American Ceramic Society
27th Annual Cocoa Beach Conference on Advanced Ceramics and Composites: A: Ceramic Engineering and Science Proceedings, Volume 24, Issue 3
How to Cite
Kawai, K. and Oguchi, M. (2003) Microstructureand Properties of W-Cr-N Composite Films Produced Byubm Sputtering Method, in 27th Annual Cocoa Beach Conference on Advanced Ceramics and Composites: A: Ceramic Engineering and Science Proceedings, Volume 24, Issue 3 (eds W. M. Kriven and H.-T. Lin), John Wiley & Sons, Inc., Hoboken, NJ, USA. doi: 10.1002/9780470294802.ch83
- Published Online: 27 MAR 2008
- Published Print: 1 JAN 2003
Print ISBN: 9780470375839
Online ISBN: 9780470294802
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